Paper Title:
Formation of Oxide Precipitates in Cz Grown Silicon
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 38-41)
Edited by
G. Ferenczi
Pages
661-666
DOI
10.4028/www.scientific.net/MSF.38-41.661
Citation
J. Seres, E. Hild, "Formation of Oxide Precipitates in Cz Grown Silicon", Materials Science Forum, Vols. 38-41, pp. 661-666, 1989
Online since
January 1991
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Price
$32.00
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