Paper Title:
A New Model of Anomalous Phosphorus Diffusion in Silicon
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 38-41)
Edited by
G. Ferenczi
Pages
719-724
DOI
10.4028/www.scientific.net/MSF.38-41.719
Citation
M. Budil, H. Pötzl, G. Stingeder, M. Grasserbauer, K. Goser, "A New Model of Anomalous Phosphorus Diffusion in Silicon", Materials Science Forum, Vols. 38-41, pp. 719-724, 1989
Online since
January 1991
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Price
$32.00
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