Paper Title:
Influence of the Plasma Regime on the Structural, Optical, Electrical and Morphological Properties of a-Si:H Thin Films
  Abstract

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Periodical
Edited by
R. Martins, I. Ferreira, E. Fortunato and G. Kroesen
Pages
11-20
DOI
10.4028/www.scientific.net/MSF.382.11
Citation
H. Águas, R. Martins, Y. Nunes, M. J.P. Maneira, E. Fortunato, "Influence of the Plasma Regime on the Structural, Optical, Electrical and Morphological Properties of a-Si:H Thin Films", Materials Science Forum, Vol. 382, pp. 11-20, 2001
Online since
November 2001
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$32.00
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