Silicon Films Produced by PECVD under Powder Formation Conditions |
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| Journal | Materials Science Forum (Volume 382) |
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| Volume | Plasma Processing and Dusty Particles |
| Edited by | R. Martins, I. Ferreira, E. Fortunato and G. Kroesen |
| Pages | 21-30 |
| DOI | 10.4028/www.scientific.net/MSF.382.21 |
| Authors | Rodrigo Martins, Hugo Águas, V. Silva, Isabel Ferreira, A. Cabrita, Elvira Fortunato |
| Keywords | Materials, Plasma Processing |
| Full Paper | 
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