Paper Title:
Silicon Films Produced by PECVD under Powder Formation Conditions
  Abstract

  Info
Periodical
Edited by
R. Martins, I. Ferreira, E. Fortunato and G. Kroesen
Pages
21-30
DOI
10.4028/www.scientific.net/MSF.382.21
Citation
R. Martins, H. Águas, V. Silva, I. Ferreira, A. Cabrita, E. Fortunato, "Silicon Films Produced by PECVD under Powder Formation Conditions", Materials Science Forum, Vol. 382, pp. 21-30, 2001
Online since
November 2001
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.