Silicon Films Produced by PECVD under Powder Formation Conditions |
| Journal |
Materials Science Forum (Volume 382) |
| Volume |
Plasma Processing and Dusty Particles |
| Edited by |
R. Martins, I. Ferreira, E. Fortunato and G. Kroesen |
| Pages |
21-30 |
| DOI |
10.4028/www.scientific.net/MSF.382.21 |
| Citation |
Rodrigo Martins et al., 2001, Materials Science Forum, 382, 21 |
| Authors |
Rodrigo Martins, Hugo Águas, V. Silva, Isabel Ferreira, A. Cabrita, Elvira Fortunato |
| Keywords |
Material, Plasma Processing |
| Full Paper |
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