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Radio Frequency Discharge with Dust Particles

Journal Materials Science Forum (Volume 382)
Volume Plasma Processing and Dusty Particles
Edited by R. Martins, I. Ferreira, E. Fortunato and G. Kroesen
Pages 69-0
DOI 10.4028/www.scientific.net/MSF.382.69
Authors Yu.I. Chutov, W.J. Goedheer, O.Yu. Kravchenko, V.M. Zuz, M. Yan
Keywords Dusty Plasma, RF Plasma Simulation, RF Plasmas
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