Paper Title:
SIMS Analyses of SiO2/4H-SiC(0001) Interface
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 389-393)
Edited by
S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages
1037-1040
DOI
10.4028/www.scientific.net/MSF.389-393.1037
Citation
K. Yamashita, M. Kitabatake, O. Kusumoto, K. Takahashi, M. Uchida, R. Miyanaga, H. Itoh, M. Yoshikawa, "SIMS Analyses of SiO2/4H-SiC(0001) Interface", Materials Science Forum, Vols. 389-393, pp. 1037-1040, 2002
Online since
April 2002
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Price
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