A Method of Reducing Micropipes in Thin Films by Using Sublimation Growth |
| Journal |
Materials Science Forum (Volumes 389 - 393) |
| Volume |
Silicon Carbide and Related Materials 2001 |
| Edited by |
S. Yoshida, S. Nishino, H. Harima and T. Kimoto |
| Pages |
107-110 |
| DOI |
10.4028/www.scientific.net/MSF.389-393.107 |
| Citation |
Naoki Oyanagi et al., 2002, Materials Science Forum, 389-393, 107 |
| Authors |
Naoki Oyanagi, Shinichi Nishizawa, Kazuo Arai |
| Keywords |
Electron Beam Deposition, Micropipe, Modified Lely Method, Sublimation Growth |
| Full Paper |
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