Paper Title:
Plasma Oxidation of SiC at Low Temperatures (below 300°C)
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 389-393)
Edited by
S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages
1105-1108
DOI
10.4028/www.scientific.net/MSF.389-393.1105
Citation
M. Satoh, H. Shimada, T. Nakamura, N. Nagamoto, S. Yanagihara, "Plasma Oxidation of SiC at Low Temperatures (below 300°C)", Materials Science Forum, Vols. 389-393, pp. 1105-1108, 2002
Online since
April 2002
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