Paper Title:
Low-Temperature Thermal Oxidation of Ion-Amorphized 6H-SiC
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 389-393)
Edited by
S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages
1109-1112
DOI
10.4028/www.scientific.net/MSF.389-393.1109
Citation
R. Nipoti, A. Parisini, A. Poggi, "Low-Temperature Thermal Oxidation of Ion-Amorphized 6H-SiC", Materials Science Forum, Vols. 389-393, pp. 1109-1112, 2002
Online since
April 2002
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Price
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