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Analysis of High Leakage Currents in 4H-SiC Schottky Barrier Diodes Using Optical Beam-Induced Current Measurements

Journal Materials Science Forum (Volumes 389 - 393)
Volume Silicon Carbide and Related Materials 2001
Edited by S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages 1141-1144
DOI 10.4028/www.scientific.net/MSF.389-393.1141
Citation Takashi Tsuji et al., 2002, Materials Science Forum, 389-393, 1141
Authors Takashi Tsuji, Syunsuke Izumi, A. Ueda, Hiroyuki Fujisawa, Katsunori Ueno, Hidekazu Tsuchida, Isaho Kamata, Tamotsu Jikimoto, Kunikaza Izumi
Keywords Annealing Temperature, Leakage Current, OBIC, TEM
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