Paper Title:
Resistivity Mapping of Semi-Insulating 6H-SiC Wafers
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 389-393)
Edited by
S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages
135-138
DOI
10.4028/www.scientific.net/MSF.389-393.135
Citation
M. D. Roth, V.D. Heydemann, W.C. Mitchel, N. K. Yushin, M. Sharma, S. P. Wang, C. M. Balkas, "Resistivity Mapping of Semi-Insulating 6H-SiC Wafers", Materials Science Forum, Vols. 389-393, pp. 135-138, 2002
Online since
April 2002
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