Paper Title:
Compatibility of VJFET Technology with MESFET Fabrication and Its Interest for System Integration: Fabrication of 6H and 4H-SiC 110 V Lateral MESFET
  Abstract

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Periodical
Materials Science Forum (Volumes 389-393)
Edited by
S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages
1403-1406
DOI
10.4028/www.scientific.net/MSF.389-393.1403
Citation
D. Tournier, P. Godignon, J. Montserrat, D. Planson, J.-P. Chante, F. Sarrus, "Compatibility of VJFET Technology with MESFET Fabrication and Its Interest for System Integration: Fabrication of 6H and 4H-SiC 110 V Lateral MESFET", Materials Science Forum, Vols. 389-393, pp. 1403-1406, 2002
Online since
April 2002
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Price
$32.00
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