A New Type of SiC Gas Sensor with a pn-Junction Structure |
| Journal |
Materials Science Forum (Volumes 389 - 393) |
| Volume |
Silicon Carbide and Related Materials 2001 |
| Edited by |
S. Yoshida, S. Nishino, H. Harima and T. Kimoto |
| Pages |
1427-1430 |
| DOI |
10.4028/www.scientific.net/MSF.389-393.1427 |
| Citation |
Kenshiro Nakashima et al., 2002, Materials Science Forum, 389-393, 1427 |
| Authors |
Kenshiro Nakashima, Yasuo Okuyama, Shinji Ando, Osamu Eryu, Koji Abe, H. Yokoi, T. Oshima |
| Keywords |
P-N Junction, Gas Sensor, Ion-Implantation, Laser Processing, Response, Sensitivity |
| Full Paper |
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