Paper Title:

A New Type of SiC Gas Sensor with a pn-Junction Structure

Periodical Materials Science Forum (Volumes 389 - 393)
Main Theme Silicon Carbide and Related Materials 2001
Edited by S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages 1427-1430
DOI 10.4028/
Citation Kenshiro Nakashima et al., 2002, Materials Science Forum, 389-393, 1427
Authors Kenshiro Nakashima, Yasuo Okuyama, Shinji Ando, Osamu Eryu, Koji Abe, H. Yokoi, T. Oshima
Keywords Gas Sensor, Ion Implantation, Laser Processing, P-N Junction, Response, Sensitivity
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