Paper Title:
Growth of AlN Films by Hot-Wall CVD and Sublimation Techniques: Effect of Growth Cell Pressure
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 389-393)
Edited by
S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages
1469-1472
DOI
10.4028/www.scientific.net/MSF.389-393.1469
Citation
A. Kakanakova-Georgieva, U. Forsberg, B. Magnusson, R. Yakimova, E. Janzén, "Growth of AlN Films by Hot-Wall CVD and Sublimation Techniques: Effect of Growth Cell Pressure", Materials Science Forum, Vols. 389-393, pp. 1469-1472, 2002
Online since
April 2002
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