Paper Title:
Growth of Epitaxial (SiC)x(AlN)1-x Thin Films on 6H-SiC by Ion-Assisted Dual Magnetron Sputter Deposition
  Abstract

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Periodical
Materials Science Forum (Volumes 389-393)
Edited by
S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages
1481-1484
DOI
10.4028/www.scientific.net/MSF.389-393.1481
Citation
S. Tungasmita, P.O.Å. Persson, T. Seppänen, L. Hultman, J. Birch, "Growth of Epitaxial (SiC)x(AlN)1-x Thin Films on 6H-SiC by Ion-Assisted Dual Magnetron Sputter Deposition", Materials Science Forum, Vols. 389-393, pp. 1481-1484, 2002
Online since
April 2002
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Price
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