Paper Title:
Recent Achievements and Future Challenges in SiC Homoepitaxial Growth
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 389-393)
Edited by
S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages
165-170
DOI
10.4028/www.scientific.net/MSF.389-393.165
Citation
T. Kimoto, S. Nakazawa, K. Fujihira, T. Hirao, S. Nakamura, Y. Chen, K. Hashimoto, H. Matsunami, "Recent Achievements and Future Challenges in SiC Homoepitaxial Growth", Materials Science Forum, Vols. 389-393, pp. 165-170, 2002
Online since
April 2002
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