Paper Title:
Growth and Electrical Characterization of the Lightly-Doped Thick 4H-SiC Epilayers
| Periodical |
Materials Science Forum (Volumes 389 - 393)
|
| Main Theme |
Silicon Carbide and Related Materials 2001
|
| Edited by |
S. Yoshida, S. Nishino, H. Harima and T. Kimoto |
| Pages |
171-174 |
| DOI |
10.4028/www.scientific.net/MSF.389-393.171 |
| Citation |
Hidekazu Tsuchida et al., 2002, Materials Science Forum, 389-393, 171 |
| Authors |
Hidekazu Tsuchida, Isaho Kamata, Tamotsu Jikimoto, Kunikaza Izumi |
| Keywords |
Electrical Characteristics, Epitaxial Growth, High Voltage (HV), Thick Layers |
| Price |
US$ 28,- |