Paper Title:
Growth and Electrical Characterization of the Lightly-Doped Thick 4H-SiC Epilayers
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 389-393)
Edited by
S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages
171-174
DOI
10.4028/www.scientific.net/MSF.389-393.171
Citation
H. Tsuchida, I. Kamata, T. Jikimoto, K. Izumi, "Growth and Electrical Characterization of the Lightly-Doped Thick 4H-SiC Epilayers", Materials Science Forum, Vols. 389-393, pp. 171-174, 2002
Online since
April 2002
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