Paper Title:

Growth and Electrical Characterization of the Lightly-Doped Thick 4H-SiC Epilayers

Periodical Materials Science Forum (Volumes 389 - 393)
Main Theme Silicon Carbide and Related Materials 2001
Edited by S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages 171-174
DOI 10.4028/www.scientific.net/MSF.389-393.171
Citation Hidekazu Tsuchida et al., 2002, Materials Science Forum, 389-393, 171
Authors Hidekazu Tsuchida, Isaho Kamata, Tamotsu Jikimoto, Kunikaza Izumi
Keywords Electrical Characteristics, Epitaxial Growth, High Voltage (HV), Thick Layers
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