Paper Title:
Fast Epitaxial Growth of 4H-SiC by Chimney-Type Hot-Wall CVD
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 389-393)
Edited by
S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages
175-178
DOI
10.4028/www.scientific.net/MSF.389-393.175
Citation
K. Fujihira, T. Kimoto, H. Matsunami, "Fast Epitaxial Growth of 4H-SiC by Chimney-Type Hot-Wall CVD", Materials Science Forum, Vols. 389-393, pp. 175-178, 2002
Online since
April 2002
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.