Paper Title:
The Effect of Epitaxial Growth on Warp of SiC Wafers
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 389-393)
Edited by
S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages
235-238
DOI
10.4028/www.scientific.net/MSF.389-393.235
Citation
K. Nakayama, Y. Miyanagi, K. Maruyama, Y. Okamoto, H. Shiomi, S. Nishino, "The Effect of Epitaxial Growth on Warp of SiC Wafers", Materials Science Forum, Vols. 389-393, pp. 235-238, 2002
Online since
April 2002
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Price
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