Paper Title:
Surface Morphology of SiC Epitaxial Layers Grown by Vertical Hot-Wall Type CVD
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 389-393)
Edited by
S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages
243-246
DOI
10.4028/www.scientific.net/MSF.389-393.243
Citation
K. Takahashi, M. Uchida, T. Yokogawa, O. Kusumoto, K. Yamashita, R. Miyanaga, M. Kitabatake, "Surface Morphology of SiC Epitaxial Layers Grown by Vertical Hot-Wall Type CVD", Materials Science Forum, Vols. 389-393, pp. 243-246, 2002
Online since
April 2002
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