Paper Title:
Homoepitaxial 'Web Growth' of SiC to Terminate C-Axis Screw Dislocations and Enlarge Step-Free Surfaces
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 389-393)
Edited by
S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages
251-254
DOI
10.4028/www.scientific.net/MSF.389-393.251
Citation
P. G. Neudeck, J. A. Powell, A. J. Trunek, D. J. Spry, G. M. Beheim, E. Benavage, P. B. Abel, W. M. Vetter, M. Dudley, "Homoepitaxial 'Web Growth' of SiC to Terminate C-Axis Screw Dislocations and Enlarge Step-Free Surfaces", Materials Science Forum, Vols. 389-393, pp. 251-254, 2002
Online since
April 2002
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Price
$32.00
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