Paper Title:
Formation of Epitaxial Mesa Structures on 4H-SiC (0001) and (11-20) Substrates
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 389-393)
Edited by
S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages
255-258
DOI
10.4028/www.scientific.net/MSF.389-393.255
Citation
Y. Chen, T. Kimoto, Y. Takeuchi, H. Matsunami, "Formation of Epitaxial Mesa Structures on 4H-SiC (0001) and (11-20) Substrates", Materials Science Forum, Vols. 389-393, pp. 255-258, 2002
Online since
April 2002
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Price
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