Paper Title:
TEM (XHREM) and EDX Studies of 6H-SiC Porous Layer as a Substrate for Subsequent Homoepitaxial Growth
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 389-393)
Edited by
S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages
271-274
DOI
10.4028/www.scientific.net/MSF.389-393.271
Citation
L.M. Sorokin, J. L. Hutchison, J. Sloan, G.N. Mosina, N.S. Savkina, V.B. Shuman, A. A. Lebedev, "TEM (XHREM) and EDX Studies of 6H-SiC Porous Layer as a Substrate for Subsequent Homoepitaxial Growth", Materials Science Forum, Vols. 389-393, pp. 271-274, 2002
Online since
April 2002
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Price
$35.00
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