Paper Title:
Impact of the Initial Surface Conditions on Defect Appearance in 4H-SiC Epilayers
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 389-393)
Edited by
S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages
283-286
DOI
10.4028/www.scientific.net/MSF.389-393.283
Citation
R. Yakimova, H. Jacobsson, M. Syväjärvi, A. Kakanakova-Georgieva, T. Iakimov, C. Virojanadara, L. I. Johansson, E. Janzén, "Impact of the Initial Surface Conditions on Defect Appearance in 4H-SiC Epilayers", Materials Science Forum, Vols. 389-393, pp. 283-286, 2002
Online since
April 2002
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Price
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