Paper Title:
Selective Epitaxial Growth of Pyramidal 3C-SiC on Patterned Si Substrate
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 389-393)
Edited by
S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages
331-334
DOI
10.4028/www.scientific.net/MSF.389-393.331
Citation
Y. Okui, C. Jacob, S. Ohshima, S. Nishino, "Selective Epitaxial Growth of Pyramidal 3C-SiC on Patterned Si Substrate", Materials Science Forum, Vols. 389-393, pp. 331-334, 2002
Online since
April 2002
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Price
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