Paper Title:
Evaluation of Carbonized Layers for 3C-SiC/Si Epitaxial Growth by Ellipsometry
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 389-393)
Edited by
S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages
335-338
DOI
10.4028/www.scientific.net/MSF.389-393.335
Citation
H. Shimizu, T. Ohba, K. Hisada, "Evaluation of Carbonized Layers for 3C-SiC/Si Epitaxial Growth by Ellipsometry", Materials Science Forum, Vols. 389-393, pp. 335-338, 2002
Online since
April 2002
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.