Paper Title:
Improved SiCOI Structures Elaborated by Heteroepitaxy of 3C-SiC on SOI
| Periodical |
Materials Science Forum (Volumes 389 - 393)
|
| Main Theme |
Silicon Carbide and Related Materials 2001
|
| Edited by |
S. Yoshida, S. Nishino, H. Harima and T. Kimoto |
| Pages |
343-346 |
| DOI |
10.4028/www.scientific.net/MSF.389-393.343 |
| Citation |
Thierry Chassagne et al., 2002, Materials Science Forum, 389-393, 343 |
| Authors |
Thierry Chassagne, Gabriel Ferro, Huiyao Wang, Y. Stoimenos, Hervé Peyre, Sylvie Contreras, Jean Camassel, Yves Monteil, B. Ghyselen |
| Keywords |
Chemical Vapor Deposition (CVD), Hetero-Epitaxy, SiCOI, SOI |
| Price |
US$ 28,- |