Paper Title:
Improved SiCOI Structures Elaborated by Heteroepitaxy of 3C-SiC on SOI
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 389-393)
Edited by
S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages
343-346
DOI
10.4028/www.scientific.net/MSF.389-393.343
Citation
T. Chassagne, G. Ferro, H. Wang, Y. Stoimenos, H. Peyre, S. Contreras, J. Camassel, Y. Monteil, B. Ghyselen, "Improved SiCOI Structures Elaborated by Heteroepitaxy of 3C-SiC on SOI", Materials Science Forum, Vols. 389-393, pp. 343-346, 2002
Online since
April 2002
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Price
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