Paper Title:
Study of Metamorphosing Top Si Layer of SOI Wafer into 3C-SiC Using Conventional Electric Furnace
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 389-393)
Edited by
S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages
347-350
DOI
10.4028/www.scientific.net/MSF.389-393.347
Citation
S. Hirai, F. Jobe, M. Nakao, K. Izumi, "Study of Metamorphosing Top Si Layer of SOI Wafer into 3C-SiC Using Conventional Electric Furnace", Materials Science Forum, Vols. 389-393, pp. 347-350, 2002
Online since
April 2002
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