Paper Title:
Low-Temperature Preparation of α-SiC Epitaxial Films by Nd: YAG Pulsed-Laser Deposition
  Abstract

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Periodical
Materials Science Forum (Volumes 389-393)
Edited by
S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages
375-378
DOI
10.4028/www.scientific.net/MSF.389-393.375
Citation
T. Kusumori, H. Muto, "Low-Temperature Preparation of α-SiC Epitaxial Films by Nd: YAG Pulsed-Laser Deposition", Materials Science Forum, Vols. 389-393, pp. 375-378, 2002
Online since
April 2002
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