Paper Title:
Reduced Micropipe Density in Boule-Derived 6H-SiC Substrates via H Etching of Seed Crystals
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 389-393)
Edited by
S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages
399-402
DOI
10.4028/www.scientific.net/MSF.389-393.399
Citation
S. E. Saddow, T. Elkington, M.C.D. Smith, "Reduced Micropipe Density in Boule-Derived 6H-SiC Substrates via H Etching of Seed Crystals", Materials Science Forum, Vols. 389-393, pp. 399-402, 2002
Online since
April 2002
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.