Paper Title:
Investigation of the Relationship between Defects and Electrical Properties of 3C-SiC Epilayers
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 389-393)
Edited by
S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages
459-462
DOI
10.4028/www.scientific.net/MSF.389-393.459
Citation
Y. Ishida, M. Kushibe, T. Takahashi, H. Okumura, S. Yoshida, "Investigation of the Relationship between Defects and Electrical Properties of 3C-SiC Epilayers", Materials Science Forum, Vols. 389-393, pp. 459-462, 2002
Online since
April 2002
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Price
$32.00
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