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4H Polytype Grain Formation in PVT-Grown 6H-SiC Ingots

Journal Materials Science Forum (Volumes 389 - 393)
Volume Silicon Carbide and Related Materials 2001
Edited by S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages 47-50
DOI 10.4028/www.scientific.net/MSF.389-393.47
Citation Tatsuo Fujimoto et al., 2002, Materials Science Forum, 389-393, 47
Authors Tatsuo Fujimoto, Masakazu Katsuno, Noboru Ohtani, Takashi Aigo, Hirokatsu Yashiro
Keywords Crystal Orientation, Multi-Domain Ingot, X-Ray Pole Figure
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