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Evolution of Crystal Mosaicity during Physical Vapor Transport Growth of SiC

Journal Materials Science Forum (Volumes 389 - 393)
Volume Silicon Carbide and Related Materials 2001
Edited by S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages 55-58
DOI 10.4028/www.scientific.net/MSF.389-393.55
Citation Masakazu Katsuno et al., 2002, Materials Science Forum, 389-393, 55
Authors Masakazu Katsuno, Noboru Ohtani, Tatsuo Fujimoto, Takashi Aigo, Hirokatsu Yashiro
Keywords Crystal Mosaicity, Physical Vapor Transport Growth, Polytype Instabilities
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