Paper Title:
Hydrogen Incorporation into SiC Using Plasma-Hydrogenation
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 389-393)
Edited by
S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages
569-572
DOI
10.4028/www.scientific.net/MSF.389-393.569
Citation
Y. Koshka, W.A. Draper, R.Y. Lakshman, J. D. Scofield, S. E. Saddow, "Hydrogen Incorporation into SiC Using Plasma-Hydrogenation", Materials Science Forum, Vols. 389-393, pp. 569-572, 2002
Online since
April 2002
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