Paper Title:

Polytype Dependence of Transition Metal-Related Deep Levels in 4H-, 6H- and 15R-SiC

Periodical Materials Science Forum (Volumes 389 - 393)
Main Theme Silicon Carbide and Related Materials 2001
Edited by S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages 573-576
DOI 10.4028/www.scientific.net/MSF.389-393.573
Citation Joachim Grillenberger et al., 2002, Materials Science Forum, 389-393, 573
Authors Joachim Grillenberger, N. Achtziger, G. Pasold, W. Witthuhn
Keywords Chromium, Deep Level, DLTS, Level Split, Polytype Dependence, Radiotracer, Tantalum, Titanium (Ti), Transition Metal, Tungsten, Vanadium
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