Characterization of SiC Epitaxial Wafers by Photoluminescence under Deep UV Excitation |
| Journal |
Materials Science Forum (Volumes 389 - 393) |
| Volume |
Silicon Carbide and Related Materials 2001 |
| Edited by |
S. Yoshida, S. Nishino, H. Harima and T. Kimoto |
| Pages |
597-600 |
| DOI |
10.4028/www.scientific.net/MSF.389-393.597 |
| Citation |
Michio Tajima et al., 2002, Materials Science Forum, 389-393, 597 |
| Authors |
Michio Tajima, M. Tanaka, Norihiro Hoshino |
| Keywords |
Deep Level, Epitaxial Layer, Mapping, Non-Uniformity, Photoluminescence (PL) |
| Full Paper |
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