Paper Title:
Spatial Mapping of the Carrier Concentration and Mobility in SiC Wafers by Micro Fourier-Transform Infrared Spectroscopy
  Abstract

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Periodical
Materials Science Forum (Volumes 389-393)
Edited by
S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages
621-624
DOI
10.4028/www.scientific.net/MSF.389-393.621
Citation
H. Yaguchi, K. Narita, Y. Hijikata, S. Yoshida, S. Nakashima, N. Oyanagi, "Spatial Mapping of the Carrier Concentration and Mobility in SiC Wafers by Micro Fourier-Transform Infrared Spectroscopy", Materials Science Forum, Vols. 389-393, pp. 621-624, 2002
Online since
April 2002
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