Paper Title:
Quantitative High-Resolution Two-Dimensional Profiling of SiC by Scanning Capacitance Microscopy
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 389-393)
Edited by
S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages
655-658
DOI
10.4028/www.scientific.net/MSF.389-393.655
Citation
V. Raineri, F. Giannazzo, L. Calcagno, P. Musumeci, F. Roccaforte, F. La Via, "Quantitative High-Resolution Two-Dimensional Profiling of SiC by Scanning Capacitance Microscopy", Materials Science Forum, Vols. 389-393, pp. 655-658, 2002
Online since
April 2002
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