Macrodefect Generation in SiC Single Crystals Caused by Polytype Changes |
| Journal |
Materials Science Forum (Volumes 389 - 393) |
| Volume |
Silicon Carbide and Related Materials 2001 |
| Edited by |
S. Yoshida, S. Nishino, H. Harima and T. Kimoto |
| Pages |
67-70 |
| DOI |
10.4028/www.scientific.net/MSF.389-393.67 |
| Citation |
H. J. Rost et al., 2002, Materials Science Forum, 389-393, 67 |
| Authors |
H. J. Rost, J. Doerschel, D. Schulz, D. Siche, Jürgen Wollweber |
| Keywords |
Macrodefects, Polytype Changes, SiC Bulk Growth, Slit Generation |
| Full Paper |
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