Paper Title:
In Situ Analysis of Thermal Oxidation on H-Terminated 4H-SiC Surfaces
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 389-393)
Edited by
S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages
709-712
DOI
10.4028/www.scientific.net/MSF.389-393.709
Citation
T. Jikimoto, H. Tsuchida, I. Kamata, K. Izumi, "In Situ Analysis of Thermal Oxidation on H-Terminated 4H-SiC Surfaces", Materials Science Forum, Vols. 389-393, pp. 709-712, 2002
Online since
April 2002
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Price
$32.00
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