Paper Title:
Development of a Multilayer SiC Surface Micromachining Process with Capabilities and Design Rules Comparable to Conventional Polysilicon Surface Micromachining
  Abstract

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Periodical
Materials Science Forum (Volumes 389-393)
Edited by
S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages
755-758
DOI
10.4028/www.scientific.net/MSF.389-393.755
Citation
X. Y. Song, S. Rajgopal, J.M. Melzak, C. A. Zorman, M. Mehregany, "Development of a Multilayer SiC Surface Micromachining Process with Capabilities and Design Rules Comparable to Conventional Polysilicon Surface Micromachining", Materials Science Forum, Vols. 389-393, pp. 755-758, 2002
Online since
April 2002
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Price
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