Paper Title:
Annealing of Implanted Layers in (1-100) and (11-20) Oriented SiC
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 389-393)
Edited by
S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages
773-778
DOI
10.4028/www.scientific.net/MSF.389-393.773
Citation
M. Satoh, "Annealing of Implanted Layers in (1-100) and (11-20) Oriented SiC", Materials Science Forum, Vols. 389-393, pp. 773-778, 2002
Online since
April 2002
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Price
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