Paper Title:
Electrical Activation of Implanted Phosphorus Ions in (0001)/(11-20)-Oriented 4H-SiC
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 389-393)
Edited by
S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages
787-790
DOI
10.4028/www.scientific.net/MSF.389-393.787
Citation
F. Schmid, M. Laube, G. Pensl, G. Wagner, M. Maier, "Electrical Activation of Implanted Phosphorus Ions in (0001)/(11-20)-Oriented 4H-SiC", Materials Science Forum, Vols. 389-393, pp. 787-790, 2002
Online since
April 2002
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.