Paper Title:
Observation of Planar Defects in 2-inch SiC Wafer
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 389-393)
Edited by
S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages
79-82
DOI
10.4028/www.scientific.net/MSF.389-393.79
Citation
H. Tanaka, T. Nishiguchi, M. Sasaki, S. Nishino, "Observation of Planar Defects in 2-inch SiC Wafer", Materials Science Forum, Vols. 389-393, pp. 79-82, 2002
Online since
April 2002
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Price
$32.00
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