Paper Title:
Codoping of 4H-SiC with N- and P-Donors by Ion Implantation
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 389-393)
Edited by
S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages
791-794
DOI
10.4028/www.scientific.net/MSF.389-393.791
Citation
M. Laube, F. Schmid, G. Pensl, G. Wagner, "Codoping of 4H-SiC with N- and P-Donors by Ion Implantation", Materials Science Forum, Vols. 389-393, pp. 791-794, 2002
Online since
April 2002
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Price
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