Paper Title:
Electrical Characteristics of Al+ Ion-Implanted 4H-SiC
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 389-393)
Edited by
S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages
803-806
DOI
10.4028/www.scientific.net/MSF.389-393.803
Citation
H. Tanaka, S. Tanimoto, M. Yamanaka, M. Hoshi, "Electrical Characteristics of Al+ Ion-Implanted 4H-SiC", Materials Science Forum, Vols. 389-393, pp. 803-806, 2002
Online since
April 2002
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Price
$32.00
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