Paper Title:
Micro-Structural and Electrical Properties of Al-Implanted & Lamp-Annealed 4H-SiC
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 389-393)
Edited by
S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages
807-810
DOI
10.4028/www.scientific.net/MSF.389-393.807
Citation
H. Nakamura, H. Watanabe, J. Yamazaki, N. Tanaka, R. K. Malhan, "Micro-Structural and Electrical Properties of Al-Implanted & Lamp-Annealed 4H-SiC", Materials Science Forum, Vols. 389-393, pp. 807-810, 2002
Online since
April 2002
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Price
$32.00
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