Paper Title:
Comparison of Al and Al/C Co-Implants in 4H-SiC Annealed with an AlN Cap
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 389-393)
Edited by
S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages
819-822
DOI
10.4028/www.scientific.net/MSF.389-393.819
Citation
K. A. Jones, P. B. Shah, M. A. Derenge, M. H. Ervin, G.J. Gerardi, J. A. Freitas, G.C.B. Braga, R.D. Vispute, R.P. Sharma, O.W. Holland, "Comparison of Al and Al/C Co-Implants in 4H-SiC Annealed with an AlN Cap", Materials Science Forum, Vols. 389-393, pp. 819-822, 2002
Online since
April 2002
Export
Price
$35.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.