Paper Title:
A Comparative Study of High-Temperature Aluminum Post-Implantation Annealing in 6H- and 4H-SiC, Non-Uniform Temperature Effects
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 389-393)
Edited by
S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages
827-830
DOI
10.4028/www.scientific.net/MSF.389-393.827
Citation
M. Lazar, C. Raynaud, D. Planson, M. L. Locatelli, K. Isoird, L. Ottaviani, J.-P. Chante, R. Nipoti, A. Poggi, G.C. Cardinali, "A Comparative Study of High-Temperature Aluminum Post-Implantation Annealing in 6H- and 4H-SiC, Non-Uniform Temperature Effects", Materials Science Forum, Vols. 389-393, pp. 827-830, 2002
Online since
April 2002
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.