Paper Title:
Post-Implantation Annealing Effects on the Surface Morphology and Electrical Characteristics of 6H-SiC Implanted with Aluminum
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 389-393)
Edited by
S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages
831-834
DOI
10.4028/www.scientific.net/MSF.389-393.831
Citation
A. Ohi, T. Ohshima, M. Yoshikawa, K. K. Lee, M. Iwami, H. Itoh, "Post-Implantation Annealing Effects on the Surface Morphology and Electrical Characteristics of 6H-SiC Implanted with Aluminum", Materials Science Forum, Vols. 389-393, pp. 831-834, 2002
Online since
April 2002
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Price
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